課程概述 |
This is a new course which will introduce some of the modern semiconductor technology in both electronics and optical-electronics area. The content of the course can be separated into two main categories: (1) Advanced nano-scale semiconductor technology and (2) Optical-electronic semiconductor technology. The students who want to take this course need to have basic knowledge in semiconductor process technology.
一.內容
Advanced nano-scale semiconductor technology
1. Advanced optical lithography and none-optical lithography: E-beam lithography, nano-imprint, and self-assembly process
2. Advanced CMOS: High-k gate oxide and metal gate
3. Advanced interconnect: Low-k materials and Cu process
4. Strained silicon in CMOS technology
5. SOI technology
6. SiGe and its application
7. Atomic-Scale Thin Films Deposition Techniques: Atomic Layer Chemical Vapor Deposition (ALCVD)
8. Characterization Techniques for Nano-science
Opto-electronic semiconductor technology
1. TFT-LCD technology
2. Conventional LED
3. Short-wavelength and white LED: GaN based LED
4. Organic LED
5. Digital camera: CCD vs. CMOS
6. Solar cell
7. Atomic-Scale Thin Films Deposition Techniques: Molecular Beam Epitaxy (MBE)
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